When I worked at Varian in 88-90' we made MBE equipment and had a service dept that cleaned and repaired the equipment.

Since that time Varian has divided and sold off parts of the company so I don't know if they still manufacture MBE equipment or do service. (INTEVAC may have taken over the MBE product line.)

My suggestion is to ASK THE MANUFACTURER.

In the semiconductor industry it is a common practice to require these kinds of maintenance and decon procedures (and training) from the manufacturer as part of the purchase, installation, and qualification of the equipment before you actually pay for the equipment.