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From: Mary Beth Mulcahy <mulcahy.marybeth**At_Symbol_Here**GMAIL.COM>
Subject: Re: [DCHAS-L] MOCVD accidents/injuries?
Date: January 25, 2012 11:57:59 AM EST
Reply-To: DCHAS-L <DCHAS-L**At_Symbol_Here**MED.CORNELL.EDU>
Message-ID: <BE28425130279043A5B92A2BC7116E23517602**At_Symbol_Here**EXCH-MBOX-1.exch.ucr.edu>

I don't have one that is specific to MOCVD, but here is one that was
related to another vapor deposition technique. I hope it helps you
out.

Santa Rosa Agilent worker burned severely in flash explosion
http://www.pressdemocrat.com/article/20110426/ARTICLES/110429571

Accident happened when someone from the lab was cleaning "a molecular
beam epitaxy device, a large piece of equipment used for producing
coatings on integrated circuits, officials said"

Sincerely,
Mary Beth Mulcahy

On Wed, Jan 25, 2012 at 8:20 AM, Russell Vernon wrote:
Dear Div CHAS members,

I am looking for examples of incidents involving the metal organic chemical
vapor deposition equipment

If you have any you can point to I will be grateful

Some people need to look at others failures before they act as though they
believe there is an elevated hazard – stories help.

Sincerely,

-Russ

Russell Vernon, Ph.D.

Director

Environmental Health & Safety

University of California, Riverside

900 University Ave

Riverside, CA 92521

www.ehs.ucr.edu

russell.vernon**At_Symbol_Here**ucr.edu

Direct (951) 827-5119

Admin (951) 827-5528

Fax (951) 827-5122

http://www.ucop.edu/riskmgt/uctrips/

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