Edited by:Richard A. Bolmen, Jr.
The third chapter gives a clue:
Copyright =A9 1998 William Andrew Inc. All rights reserved
1998, Pages 187-203, doi:10.1016/B978-081551418-3.50009-6
Some materials used in semiconductor operations are highly toxic. Dopant gases such as arsine and phosphine can kill at low concentrations. Corrosives such as hydrochloric acid, hydrofluoric acid and hydrogen peroxide can cause serious damage to eyes and skin. Often they are used in high concentrations at elevated temperatures to increase their efficacy, further aggravating the danger to the worker. By-product materials that must be removed from tooling and fixtures can be carcinogenic, like arsenic. Other products of reaction can be caught in cold traps and cause explosions. The breadth and complexity of the chemistry underlying semiconductor operations merits careful examination and effective worker training. The proper use of engineering controls, personal protective equipment, and knowledge of correct use procedures are imperative in the high-tech, high-energy world of semiconductors.
Reinhard Sidor, ScD
GE Corp. R&D-retired
Silane is SiH4.
SiO2 is silicone dioxide.
Which are we talking about?
Cecilia M. Schreyer
Instructional Associate, Chemistry
President, Classified Senate
Orange Coast College
2701 Fairview Road - Costa Mesa, CA 92626
From: DCHAS-L Discussion List [mailto:dchas-l**At_Symbol_Here**med.cornell.edu] On Behalf Of NEAL LANGERMAN
Sent: Saturday, October 03, 2015 1:51 PM
Subject: [DCHAS-L] Silane Fire and Explosion
From Eugene Ngai, the Silane Guru-
Forwarded by Neal Langerman
From: ehs.grapevine**At_Symbol_Here**semi.org [mailto:ehs.grapevine**At_Symbol_Here**semi.org] On Behalf Of Eugene Ngai
Sent: Saturday, October 3, 2015 12:36 PM
To: 'Semi Grapevine' <ehs.grapevine**At_Symbol_Here**semi.org>
Subject: SEMI EHS GRAPEVINE - Silane Fire and Explosion
FYI. Sunedison Pasadena TX which was formerly MEMC had a silane explosion and fire injuring 4 people. This occurred during a line break. I am trying to get more details. As luck would have it, I'm presenting on Pyrophoric Materials on Oct 23 at the Hotzone HazMat Conference in Houston.
A month ago in another silane related incident, a user used an industrial vacuum cleaner to vacuum SiO2 particles from a baghouse. This exploded severely burning the worker.. SiO2 particles can develop a significant charge, in addition some are not fully oxidized.
These are reminders that we all must be careful when handling silane.
Eugene Y. Ngai
Chemically Speaking LLC
To unsubscribe from this group and stop receiving emails from it, send an email to ehs.grapevine+unsubscribe**At_Symbol_Here**semi.org.
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