All: The Semiconductor Equipment Manufacturers Institute (SEMI) has published an update on fluorinated gases (F-Gases) as follows:
Please note that a revised version of the SEMI FAQ on the EU F-Gas Regulation is available on the SEMI website:
http://www.semi.org/eu/semi-faq-eu-f-gas-regulation
The SEMI FAQ provides guidance on compliance for semiconductor manufacturing equipment that may contain F-Gases in components.
You do not need to be a SEMI member to download this
Neal
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