From: Eugene Ngai <eugene_ngai**At_Symbol_Here**COMCAST.NET>
Subject: [DCHAS-L] SDS
Date: Tue, 25 May 2021 12:12:22 -0400
Reply-To: ACS Division of Chemical Health and Safety <DCHAS-L**At_Symbol_Here**Princeton.EDU>
Message-ID: 006301d75180$c36fd970$4a4f8c50$**At_Symbol_Here**

Suppliers of small research quantities of chemicals often have limited test data. Given the small quantities and limited safety test information it is supplied outside of the TSCA regulations. A good example of this is Trisilylamine which had limited use in 2009 and was a challenge to manufacture. The SDS in 2009 stated

Trisilylamine is not included in the TSCA Inventory. In accordance with the

conditions listed in 40 CFR 320.36 and 721.47, this product must be used only for research and development

purposes and must be used by, or directly under the supervision of, a technically qualified individual. It is

manufactured only in small quantities for research and development usage. The manufacturer should be

consulted prior to using this product for other applications.

At that time it was classified for transportation as

UN 1993, Flammable liquid, n.o.s. (Trisilylamine), 3, Packing Group !!

After this became a significant new chemical for Atomic Layer Deposition processes extensive testing was done and it was reclassified as

UN 3491, Toxic by Inhalation Liquid, Water Reactive, Flammable, n.o.s., (Trisilylamine), 6.1, (4.3, 3, 8), Packing Group I


Eugene Ngai

Chemically Speaking LLC


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