From:
Neal Langerman <chemsaf**At_Symbol_Here**GMAIL.COM>
Subject:
Re: [DCHAS-L] RIBE Disposal?
Date:
Jun 23, 2026 13:57 UTC
Reply-To:
chemsaf**At_Symbol_Here**gmail.com
In-Reply-To:
[DCHAS-L] RIBE Disposal?
Jack
Talk to the PIs doing ion implantation. There used to be a used equipment market.. You may need to analyze the residue in the chamber. Likely V-VII chemistry.
Can you share Manufacturer, model, etc?
Neal Langerman, PhD
Hi all,
A facility on campus is looking to dispose of an old Reactive Ion Beam Etcher (RIBE) and we’re trying to figure out how to go about it. The instrument has been essentially abandoned for some time now, and the PI who originally owned it has passed away.
We don’t really know what the likely contaminants are. Have others dealt with disposing of this kind of equipment? If so, how did you go about it? Thanks!
Sincerely,
Jack Reidy (he/him)
Research Safety Specialist & Chemical Hygiene Officer
Environmental Health & Safety
Stanford University
Tel: (650) 497-7614
I acknowledge that the land on which I live and work is the ancestral and unceded land of the
Muwekma Ohlone Tribe. As an uninvited guest on these lands, I am a beneficiary of the ongoing
displacement of the Ohlone people. I pay my respects to the Native peoples, past and present.
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