Thanks Neal! I’m suspecting a residue analysis is in our future, yeah. There is minimal labeling on the equipment. Based on knowing which PI it originally belonged to and looking into the history of RIBE,
it’s very possible that this is an early enough version that there weren’t standard makes and models. There’s a plaque with “Ion Equipment Corporation” on it, but it appears they’re defunct. Besides a few eBay listings for second-hand system components, most
of what I can find on them is a bunch of court listings and case law write-ups about a 1980 lawsuit they filed.
Jack Reidy (he/him)
Research Safety Specialist & Chemical Hygiene Officer
Environmental Health & Safety
Stanford University
484 Oak Road, Stanford, CA, 94305
Tel: (650) 497-7614
I acknowledge that the land on which I live and work is the ancestral and unceded land of the
Muwekma Ohlone Tribe. As an uninvited guest on these lands, I am a beneficiary of the ongoing displacement of the Ohlone people. I pay my respects to the Native peoples, past and present.
From: ACS Division of Chemical Health and Safety <DCHAS-L**At_Symbol_Here**PRINCETON.EDU>
On Behalf Of Neal Langerman
Sent: Tuesday, June 23, 2026 6:57 AM
To: DCHAS-L**At_Symbol_Here**PRINCETON.EDU
Subject: Re: [DCHAS-L] RIBE Disposal?
Jack Talk to the PIs doing ion implantation. There used to be a used equipment market. .
You may need to analyze the residue in the chamber. Likely V-VII chemistry. Can you share Manufacturer, model, etc? Neal Langerman, PhD On Tue, Jun 23, 2026,
Talk to the PIs doing ion implantation. There used to be a used equipment market.. You may need to analyze the residue in the chamber. Likely V-VII chemistry.
Can you share Manufacturer, model, etc?
A facility on campus is looking to dispose of an old Reactive Ion Beam Etcher (RIBE) and we’re trying to figure out how to go about it. The instrument has been essentially abandoned for some time now, and
the PI who originally owned it has passed away. We don’t really know what the likely contaminants are. Have others dealt with disposing of this kind of equipment? If so, how did you go about it? Thanks!
Sincerely,
Research Safety Specialist & Chemical Hygiene Officer
Environmental Health & Safety
I acknowledge that the land on which I live and work is the ancestral and unceded land of the
Muwekma Ohlone Tribe. As an uninvited guest on these lands, I am a beneficiary of the ongoing displacement of the Ohlone people. I pay my respects to the Native peoples, past and present.
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